SCRATCH DIRECTION AND THRESHOLD FORCE IN NANOSCALE SCRATCHING USING ATOMIC FORCE MICROSCOPES

Publication year: 2011
Source: Applied Surface Science, In Press, Accepted Manuscript, Available online 13 June 2011

Ampere A., Tseng , Chung-Feng Jeffrey, Kuo , Shyankay, Jou

The nanoscaled tip in an AFM (atomic force microscope) has become an effective scratching tool for material removing in nanofabrication. In this article, the characteristics of using a diamond-coated pyramidal tip to scratch Ni-Fe thin film surfaces was experimentally investigated with the focus on the evaluation of the influence of the scratch or scan direction on the final shape of the scratched geometry as well as the applied scratch force. Results indicated that both the scratched profile and the scratch force were greatly affected by the scratch direction. It has been found that, to minimize the formation of protuberances along…

 Highlights: ► he nanoscale scratching characteristics of using a pyramidal tip was experientially studied. ► Both the scratched profile and the scratch force were greatly affected by the scratch direction. ► To minimize the ridge formation, the tip face should be perpendicular to the scratching direction.